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Gettering and defect engineering in semiconductor technology XV : selected papers from the 15th Gettering and Defect Engineering in Semiconductor Technology Conference, September 22-27, 2013, Oxford, UK / edited by J.D. Murphy. by Series: Diffusion and defect data. Pt. B, Solid state phenomena ; ; v. 205/206.
Material type: Text Text; Format: available online remote; Literary form: Not fiction
Publisher: Durnten-Zurich : Trans Tech publications Ltd, [2014]
Other title:
  • Gettering and defect engineering in semiconductor technology 15
Online resources:
Availability: Items available for loan: OPJGU Sonepat- Campus (1).
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